| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample holder and a sample table that enable examination of the samples for examination, from many directions in the electron microscope. SOLUTION: The sample holder 10 is for a transmission electron microscope(TEM). In the TEM, the electron beam incidence direction is Z direction. The sample table 17 and the examination sample SA, which is fixed to it, are rotatable by a motor 12 in the range of 0 deg.-360 deg. about an axis in Y direction, which is a direction different from the electron beam incidence direction. Thereby, the electron beam enters from many directions of the examination sample SA and the examination sample SA can be examined from many directions. The FIB processing of the examination sample SA can be made from many directions without removing the examination sample SA from the sample holder 10, and thereby handling at the FIB processing is made easy.
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