发明名称 SEMICONDUCTOR MEMORY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor memory device which is equipped with a flash memory cell and has a fast write speed. SOLUTION: This semiconductor memory device is equipped with a memory cell, having a channel region and a drain region and a source region formed on both the sides of the channel region, a floating gate formed on the channel region across a 1st oxide film, and a control gate formed on the floating gate across a 2nd oxide film on a p-type Si substrate. The floating gate is formed of a 1st region on the channel region, and a 2nd area which is wider than the 1st region and sectioned into a T shape. The height of the 1st region is so set that, when a control voltage is applied to the floating gate, the potential of the floating gate becomes maximum.
申请公布号 JP2002026151(A) 申请公布日期 2002.01.25
申请号 JP20000203897 申请日期 2000.07.05
申请人 MITSUBISHI ELECTRIC CORP 发明人 KOBAYASHI KIYOTERU
分类号 H01L21/8247;H01L27/115;H01L29/423;H01L29/788;H01L29/792;(IPC1-7):H01L21/824 主分类号 H01L21/8247
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