| 摘要 |
PROBLEM TO BE SOLVED: To provide a test method for ferroelectric memory by which normal/ defective conditions of an imprint characteristic and an imprint lifetime can be discriminated efficiently with non-destruction from a hysteresis characteristic of a capacitor in a ferroelectric memory. SOLUTION: When a hysteresis characteristic of a capacitor in a ferroelectric memory is measured and this value is displayed by a coordinates of which the axis of abscissa indicates applied voltage and the axis of ordinate indicateds quantity of polarization charges, a tangential line of an intersection of this hysteresis characteristic curve and the abscissa or the ordinate is quantified as a parameter, a parameter valtue indicating the lifetime is obtained from relation between this parameter and a lifetime by an imprint characteristic of the ferroelectric memory, and normal/defective condition of an imprint characteristic and an imprint lifetime of the ferroelectric memory is discriminated making this value as discrimination reference.
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