| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method of an electron source substrate which forms surface-conducting electron emission element with few number of processes, stably with high yield rate and at a low cost by an ink jet droplet addition method. SOLUTION: An electron emission element group is formed by adding four drop of droplets between element electrodes, and then a small space is provided at a region Xa, region Xb, region Ya and region Yb, other than a region X and region Y that is a region which forms an electron emission element group, or outside of the region forming an electron element group, where similar plurality of pairs of element electrodes are formed, between which droplets of solution containing materials of conductive thin film are added in spray, whereby a pattern of element electrodes and a conductive film similar to the electron emission elements are formed (here, installed at four corners). Functions or the like of elements at formation of the electron emission part by forming treatment are checked by the pattern of the element electrodes and the conductive thin film formed outside the region forming the electron emission element group.</p> |
