发明名称 ILLUMINATING OPTICAL DEVICE, AND ALIGNER PROVIDED WITH THE ILLUMINATING OPTICAL DEVICE
摘要 PROBLEM TO BE SOLVED: To form a secondary light source in a ring-belt shape, provided with a desired ring belt ratio without practically losing a light quantity in a lighting type for light-converging a mercury lamp, for instance, by an elliptical mirror. SOLUTION: This device is provided with a collimation optical system (5) for converting luminous fluxes from a light source (1) which is converged by a reflection mirror (2) to almost parallel luminous fluxes and a multiple light source forming means (7) for forming a practical surface light source, composed of many light sources based on the almost parallel luminous fluxes. The collimation optical system is constituted, so as to set the center opening part of the reflecting mirror and the incident surface of the multiple light source formation means to optically almost conjugate relation. In an optical path between the collimation optical system and the multiple light source formation means, a luminous flux conversion member (6) for practically converting incident luminous fluxes to the luminous fluxes in the ring belt shape or the plural luminous fluxes eccentric with respect to an optical axis is provided.
申请公布号 JP2002025898(A) 申请公布日期 2002.01.25
申请号 JP20000207670 申请日期 2000.07.10
申请人 NIKON CORP 发明人 NAKAJIMA MASAYA
分类号 G02B19/00;G03F7/20;H01L21/027;(IPC1-7):H01L21/027 主分类号 G02B19/00
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