RADIOACTIVE IMAGE PICKUP DEVICE AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To realize a large-area image pickup device using a stepper with exposure width limited while a process rule realized by the stepper is maintained. SOLUTION: A is a region determined by a maximum exposure width of an exposure equipment and is an electrically independent imaging element unit. Each square semiconductor board comprises at least one imaging element. Two pairs of them are arranged in lengthwise direction to constitute, for example, an imaging device about 26 cm×20 cm. This size is sufficient as an imaging area required for a mammography in medical care. A plurality of strip-like imaging elements are tiled. 601 is a pixel region. 602 is a mounting region.