| 摘要 |
PROBLEM TO BE SOLVED: To improve safety of operation in maintenance operation, etc., by enabling the filling state of gas in a gas piping to be displayed in a semiconductor manufacturing device. SOLUTION: The device is provided with gas state detection means 15, 30, 31, which detect the state of gas in a piping based on the opening and closing state of an opening/closing valve provided to a gas piping and the state of gas in a gas piping detected in the previous detection; and a display means 12 for displaying the state of gas in a gas piping in a display means.
|
