发明名称 |
DEVICE AND METHOD FOR MANUFACTURING MAGNETIC RECORDING MEDIUM |
摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for manufacturing a magnetic recording medium, by which no deterioration occurs in the characteristic of the magnetic recording medium even when a small sized magnetic recording medium is manufactured without changing the target of a film-forming device according to the size of a substrate to be manufactured. SOLUTION: An annular disk member for shielding only the outer edge part of a substrate without covering a substrate surface is installed between the substrate and each of targets positioned in both sides of the substrate.
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申请公布号 |
JP2002025052(A) |
申请公布日期 |
2002.01.25 |
申请号 |
JP20000202693 |
申请日期 |
2000.07.04 |
申请人 |
FUJI ELECTRIC CO LTD |
发明人 |
SAKAI YASUSHI;ONIZUKA TAKESHI;YAMAGISHI MINORU |
分类号 |
C23C14/34;G11B5/851;(IPC1-7):G11B5/851 |
主分类号 |
C23C14/34 |
代理机构 |
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