发明名称 DEVICE AND METHOD FOR MANUFACTURING MAGNETIC RECORDING MEDIUM
摘要 PROBLEM TO BE SOLVED: To provide a device and a method for manufacturing a magnetic recording medium, by which no deterioration occurs in the characteristic of the magnetic recording medium even when a small sized magnetic recording medium is manufactured without changing the target of a film-forming device according to the size of a substrate to be manufactured. SOLUTION: An annular disk member for shielding only the outer edge part of a substrate without covering a substrate surface is installed between the substrate and each of targets positioned in both sides of the substrate.
申请公布号 JP2002025052(A) 申请公布日期 2002.01.25
申请号 JP20000202693 申请日期 2000.07.04
申请人 FUJI ELECTRIC CO LTD 发明人 SAKAI YASUSHI;ONIZUKA TAKESHI;YAMAGISHI MINORU
分类号 C23C14/34;G11B5/851;(IPC1-7):G11B5/851 主分类号 C23C14/34
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