发明名称 |
Cooling of a vacuum pump used in the semiconductor industry, uses proximity sensor to control the cooling of the stator in maintain the optimum play between stator and rotor |
摘要 |
The pump includes a proximity sensor (16) disposed in the stator (1) and adapted to detect the play (E) at the neighborhood of a control zone (17) between the stator and the rotor (4). The control zone is in or at the neighborhood of the critical zone (117) where the contact is most probable between the rotor and the stator during one evolution of temperature of the rotor and/or the stator. The signal produced by the sensor is used for controlling the cooling circuit of the stator, in order to maintain the play at a value greater to the minimum admissible value. |
申请公布号 |
FR2812041(A1) |
申请公布日期 |
2002.01.25 |
申请号 |
FR20000009520 |
申请日期 |
2000.07.20 |
申请人 |
ALCATEL |
发明人 |
RIVAL JEAN LUC |
分类号 |
F01C21/10;F04C18/08;F04C18/12;F04C28/28;F04C29/04 |
主分类号 |
F01C21/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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