发明名称 MAGNETIC BODY ELEMENT, THIN FILM MAGNETIC HEAD AND METHOD FOR MANUFACTURING THEM
摘要 PROBLEM TO BE SOLVED: To provide a magnetic body element or a thin film magnetic head including a magnetic separation film, a magnetic gap film, a flattening film and a protective film in its element constitution, which consist of a non-magnetic material having lower hardness and stress and uniform film quality compared with a film formed by a conventional sputtering method and consisting essentially of alumina, capable of shortening processing time and dispensing with high temperature processing and to provide a method for manufacturing the magnetic body element or the thin film magnetic head. SOLUTION: The magnetic body element or the magnetic head and the method for manufacturing the magnetic body element or the magnetic head are characterized in that a negative type pattern forming material containing at least a resin containing a residual silanol group and a Si-O bond and a compound forming an acid when irradiated with active actinic radiation or heated is used for the magnetic separation film, the protective film or the flattening film constituted of the non-magnetic material.
申请公布号 JP2002025010(A) 申请公布日期 2002.01.25
申请号 JP20000206833 申请日期 2000.07.04
申请人 HITACHI LTD 发明人 TSUCHIYA HIROKO;WATANABE KATSURO
分类号 G03F7/004;G03F7/075;G11B5/31;G11C11/14 主分类号 G03F7/004
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