| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a frequency adjustment method for a piezoelectric resonator that cap apply 1:1 frequency adjustment to each element in a stage of a piezoelectric substrate before a completed product and apply frequency adjustment to the element with high accuracy in a comparatively short time. SOLUTION: The frequency adjustment method for the piezoelectric resonator that adjusts a frequency of each element by emitting an ion beam to electrodes formed on the surface of a piezoelectric substrate so as to etch the electrodes, includes a step where a correlation between an emission time of the ion beam and a frequency change is obtained, a step where the frequency of each element in the piezoelectric substrate is measured, a step where the frequency adjustment amount of each element is obtained from a difference between the measured frequency and a target value, a step where an emission time of the ion beam to each element is obtained by using the correlation on the basis of the frequency adjustment amount, and a step where the ion beam is emitted to each element for the obtained emission time.</p> |
