| 摘要 |
PROBLEM TO BE SOLVED: To provide a pilot type pressure proportional control valve system for quietly and precisely controlling supply pressure with high responsiveness. SOLUTION: A pilot type pressure proportional control valve 10 is provided with a first diaphragm chamber 16 and a second diaphragm chamber 17 separated by a pilot valve 14 constituted as a diaphragm structure, and the second diaphragm chamber 17 is communicated with an output port 12. Also, this pilot type pressure proportional control valve 10 is provided with an electromagnetic valve 25 for supply arranged between the first diaphragm chamber 16 and a supply air source, an orifice 26 arranged between the first diaphragm chamber 16 and an exhaust pipe, and a pressure gauge 29 for measuring the pressure of the output port 12. An electromagnetic valve 25 for supply of the pilot type pressure proportional control valve 10 is controlled, and the pressure of the first diaphragm chamber 16 is made correspond to the measured value of the pressure gauge 29 so that the position of a main valve can be controlled, and that the pressure of the output port 12 can be controlled.
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