Arrangement for generation of low temperature plasma at atmospheric pressure, has electrode system or parts of it provided with electrical networks for matching impedance to output data of high frequency generators

摘要

An arrangement for the generation of a low temperature plasma at atmospheric pressure consists of two electrode systems between which a high frequency voltage is applied and which have spacings between 10 and 1000 microns filled with the plasma-generating gas. The electrode system altogether or parts of it is/are provided with electrical networks (18) for the matching of the impedance of the electrode system and the plasma generated with it to the output data of high frequency generators (14). The electrode system consists of a strip-like electrode pair (15) arranged in parallel which is connected to the high frequency. The electrode system also consists of several strip-like electrode pairs to which the high frequency is connected directly by parallel wiring.