GCIB SIZE DIAGNOSTICS AND WORKPIECE PROCESSING

摘要

Methods and apparatus for measuring the distribution of cluster ion sizes in a gas cluster ion beam (GCIB) (202) and for determining the mass distribution and mass flow of cluster ions in a GCIB processing system (200) without necessitating the rejection of a portion of the beam (202) through magnetic or electrostatic mass analysis. The invention uses time-of-flight measurement means (226) to estimate or monitor cluster ion size distribution either before or during processing of a workpiece (210). The measured information is displayed and incorporated in automated control of a GCIB processing system.