| 摘要 |
A reference table tilting mechanism has a reference table which is supported by a plate spring and is adjusted of its angle of inclination by means of first and second angle adjusting machines constituted by an eccentric cam mechanism. Angles of inclination of the reference table in first and second directions are detected by first and second inclination angle sensors. Based on the detected angles by these sensors, the respective angle adjusting machines are feed-back controlled to make the angle of inclination of the reference table to be a desired one in each direction. Whereby, such a reference table tilting mechanism can be realized that has a simplified structure and a high rigidity, and is manufactured at a low price.
|
