发明名称 LOW DIELECTRIC CONSTANT MATERIALS WITH POLYMERIC NETWORKS
摘要 <p>A low dielectric constant material has a polymeric network that is fabricated from a first and a second component. The first component comprises a polymeric strand, and the second component comprises a molecule having a central portion with at least three arms extending from the central portion, wherein each of the arms includes a backbone with a reactive group. The first component and the second component form the polymeric network in a reaction that involves at least one of the reactive groups when the first and second components are thermally activated. Contemplated low dielectric constant materials are advantageously employed in the fabrication of electronic devices, and particularly contemplated devices include integrated circuits</p>
申请公布号 WO2002006366(A1) 申请公布日期 2002.01.24
申请号 US2001022213 申请日期 2001.07.12
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