发明名称 SYSTEM AND METHOD FOR PRODUCT YIELD PREDICTION USING A LOGIC CHARACTERIZATION VEHICLE
摘要 <p>A characterization vehicle includes at least one combinatorial logic circuit element, and a control circuit (102) that controls the combinatorial logic circuit element. The control circuit includes an input mechanism (103) for inputting a test pattern of signals into the combinatorial logic circuit element. An output mechanism (104) stores an output pattern that is output by the combinatorial logic circuit element based on the test pattern.</p>
申请公布号 WO0137322(A3) 申请公布日期 2002.01.24
申请号 WO2000US31839 申请日期 2000.11.17
申请人 PDF SOLUTIONS, INC.;STINE, BRIAN, E.;HESS, CHRISTOPHER;WEILAND, LARG, H.;CIPLICKAS, DENNIS, J. 发明人 STINE, BRIAN, E.;HESS, CHRISTOPHER;WEILAND, LARG, H.;CIPLICKAS, DENNIS, J.
分类号 H01L21/02;H01L21/66;H01L21/822;H01L23/544;H01L27/04;H03K19/00;(IPC1-7):G06F17/50 主分类号 H01L21/02
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