DISPLACEMENT DETECTOR AND PROCESSING SYSTEM

摘要

A displacement detector capable of accurately detecting the presence or absence and the amount of the displacement of a disk-like processed body (W) having an orientation identifying cut-out part (OF) on the peripheral part thereof, comprising three profile detection sensors (36-1 to 36-3, 38-1 to 38-3) disposed so as to detect the position of the peripheral profile of the processed body excluding the orientation identifying cut-out part and a displaced amount calculation part (40) for calculating the amount of displacement between the center position of the processed body and a reference origin based on the values detected by the three profile detection sensors, whereby the presence or absence and the amount of the displacement of the processed body can be provided accurately without being affected by the manufacturing error and thermal telescoping of the processed body.