发明名称 |
VIBRATION ISOLATING DEVICE USING MAGNETIC LEVITATING DEVICE |
摘要 |
A vibration isolating device capable of stably supporting a vibration isolating table to surely insulate a vibration-protected device from an external vibration, comprising a the vibration isolating table (10), magnetic levitating devices (31) to (34) supporting the vibration isolating table (10) in the state of non-contact with the table and applying a control force to the table, displacement sensors (41) to (44) detecting the relative displacement amount of the vibration isolating table (10) relative to a foundation and outputting displacement signals, acceleration sensors (61) to (63) outputting acceleration signals when detecting the vibration of the foundation, and a controller (5), the controller further comprising a first control loop for positioning the vibration isolating table (10) relative to the foundation by providing a feedback of the displacement signals to the magnetic levitating devices (31) to (34) and a second control loop for suppressing the transmission of vibration from the foundation to the vibration isolating table (10) by providing a feed-forward of the acceleration signals to the magnetic levitating devices (31) to (34) after compensation.
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申请公布号 |
WO0206700(A1) |
申请公布日期 |
2002.01.24 |
申请号 |
WO2001JP06050 |
申请日期 |
2001.07.12 |
申请人 |
EBARA CORPORATION;WATANABE, KATSUHIDE;HAGA, TAKAHIDE;KANEMITSU, YOICHI |
发明人 |
WATANABE, KATSUHIDE;HAGA, TAKAHIDE;KANEMITSU, YOICHI |
分类号 |
F16F15/02;F16F15/03;G03F7/20;G05D19/02;H01L21/027;(IPC1-7):F16F15/03 |
主分类号 |
F16F15/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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