| 摘要 |
Disclosed is an apparatus and method for controlling boiling condition of hot H3PO4 solution by adjusting the vapor extracting rate thereof, wherein an acid tank filled with hot H3PO4 solution to a level surface is located in a treatment room and a temperature thermocouple is arranged above the level surface of the hot H3PO4 solution to monitor the vapor temperature near the level surface of the H3PO4 solution. The vapor temperature is used to adjust the extracting rate of the treatment room by control of a damper connected to an outlet of the treatment room. According to the present invention, the treatment apparatus and method can control the boiling condition of the hot H3PO4 solution thereof by properly adjusting the extracting rate, and therefore avoid defects and loss of control in manufacturing processes.
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