Electronic storage element used in CMOS technology comprises carbon nanotubes arranged skew to each other or crossing each other so that an electrical coupling is produced between the tubes

摘要

Electronic storage element (600) comprises first nanotubes (601) and second nanotubes (603) arranged skew to each other or crossing each other so that an electrical coupling is produced between one part of the first tubes and one part of the second tubes. It is possible to decide whether the tubes are electrically coupled to each other or not at their crossing points (605). An Independent claim is also included for a process for the production of an electronic storage element. Preferred Features: The nanotubes are carbon nanotubes. A dielectric is arranged between the first and second nanotubes. A layer system made up of a first silicon dioxide layer, a silicon nitride layer and a second silicon dioxide layer is arranged between the first and second nanotubes.