发明名称 |
Contactless total charge measurement with corona |
摘要 |
A method of measuring total charge of an insulating layer on a semiconductor substrate includes applying corona charges to the insulating layer and measuring a surface photovoltage of the insulating layer after applying each of the corona charges. The charge density of each of the corona charges is measured with a coulombmeter. A total corona charge required to obtain a surface photovoltage of a predetermined fixed value is determined and used to calculate the total charge of the insulating layer. The fixed value corresponds to either a flatband or midband condition.
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申请公布号 |
US2002008536(A1) |
申请公布日期 |
2002.01.24 |
申请号 |
US20010964944 |
申请日期 |
2001.09.27 |
申请人 |
MILLER TOM G.;VERKUIL ROGER L.;HORNER GREGORY S. |
发明人 |
MILLER TOM G.;VERKUIL ROGER L.;HORNER GREGORY S. |
分类号 |
G01R29/24;G01R31/265;G01R31/28;(IPC1-7):G01R31/26 |
主分类号 |
G01R29/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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