Clean room having an escalator, and method of transporting a semiconductor device therein

摘要

In a clean room having a plurality of floors of different levels, an escalator is disposed between the plurality of floors for transporting an article between the floors. A self-propelled vehicle is used for transporting an article between floors. The self-propelled vehicle and the article are loaded on a step of the escalator. The vehicle and the article are held on the step from above the article by means of a holding section. The holding section assists loading of the vehicle onto the escalator through the article in the vicinity of an entrance gate of the escalator and assists unloading of the vehicle from the escalator in the vicinity of an exit gate.