发明名称 |
Evaluation of semiconductor wafer structure form uses CAD and SEM line segment data |
摘要 |
The evaluation of the structure of a semiconductor wafer (3) uses CAD input data fed to a unit (5) that extracts line segment scanning electron microscope (SEM) data. This is used together with reference data by a checking unit (6) and the platform (2) mounted wafer is moved for accurate positioning. |
申请公布号 |
DE10134240(A1) |
申请公布日期 |
2002.01.24 |
申请号 |
DE2001134240 |
申请日期 |
2001.07.13 |
申请人 |
SEIKO INSTRUMENTS INC., CHIBA |
发明人 |
MATSUOKA, RYOICHI |
分类号 |
G01B15/04;G01B21/20;G01N23/225;G06T7/00;H01L21/66 |
主分类号 |
G01B15/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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