发明名称 PHOTODETECTOR ARRAY
摘要 <p>A photodetector array whose characteristics are prevented from deteriorating because of crosstalk. An n-InP layer, an i-InGaAs layer and an n-InP layer are formed on an n-InP substrate. Zn is diffused in the n-InP layer to form a p-type diffused region, thus fabricating a pin photodiode. A protective insulating film is formed on this structure so as to have a film thickness satisfying a non-reflective condition. A light shielding film is formed on the protective insulating film so as to cover regions between the light receiving parts.</p>
申请公布号 WO0207226(A1) 申请公布日期 2002.01.24
申请号 WO2001JP06121 申请日期 2001.07.16
申请人 NIPPON SHEET GLASS CO., LTD.;KOMABA, NOBUYUKI;TAGAMI, TAKASHI;ARIMA, YASUNORI;KUSUDA, YUKIHISA 发明人 KOMABA, NOBUYUKI;TAGAMI, TAKASHI;ARIMA, YASUNORI;KUSUDA, YUKIHISA
分类号 H01L27/00;H01L27/146;H01L31/00;H01L31/105;(IPC1-7):H01L31/105 主分类号 H01L27/00
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