发明名称 ASSEMBLY COMPRISING A STRUCTURED SUPPORT ELEMENT AND A SUBSTRATE FUNCTIONALLY LINKED THEREWITH
摘要 <p>The invention relates to an assembly (10) comprising a structured support element (11) and a substrate (12) functionally linked therewith, especially a semiconductor waver. The invention is characterized in that the support element (11) is provided with a plurality of spaced apart support portions (13) that are preferably located in the outer edge area of the substrate (12) and that functionally link the substrate (12) with the support element (11). Said support portions (13) are preferably located in a corner section of the substrate (12) that has a substantially rectangular shape and of the support element (11) that has a corresponding shape.</p>
申请公布号 WO2002007490(A2) 申请公布日期 2002.01.24
申请号 DE2001002600 申请日期 2001.07.17
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