发明名称 A single crystal-manufacturing equipment and a method for manufacturing the same
摘要 An equipment is disclosed for producing a single crystal in each of plural containers by thermally treating a raw material for the single crystal each charged in each of the container, including heaters provided corresponding to each of the containers, an elevator to move each of the containers upward and downward relatively to the respective one of the heaters, and a connecting member to connect at least one of the container and the heater of each of plural sets of the containers and the heaters mechanically to the elevator, wherein each container is moved vertically relatively to the respective one of the heaters by driving the elevator and passed through an area of thermal treatment formed by the heater to continuously form a melt in the raw material inside the container, and the single crystal is continuously produced in the container by solidifying the melt. <IMAGE>
申请公布号 EP0947610(A3) 申请公布日期 2002.01.23
申请号 EP19990302399 申请日期 1999.03.29
申请人 NGK INSULATORS, LTD. 发明人 OHUCHI, RYUICHI;IMAEDA, MINORU
分类号 H01L21/368;C30B11/00;C30B13/16;C30B29/46 主分类号 H01L21/368
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