发明名称 METHOD FOR PRODUCING THIN SEMICONDUCTOR FILM IN AQUEOUS SOLUTION AND APPARATUS THEREFOR
摘要 <p>PROBLEM TO BE SOLVED: To provide a method for producing a thin semiconductor film in an aqueous solution by which a thin film of a chalcogen compound semiconductor other than a sulfide semiconductor, e.g. CdSe, CdTe, ZnSe, ZnTe or CuInSe2 or Se or Te as a semiconductor of a simple substance, is produced by a PCD (photochemical deposition) method and to provide an apparatus for producing the thin semiconductor film. SOLUTION: The apparatus has a treatment vessel 1 containing an acidic aqueous solution containing selenite ions or tellurite ions and sulfite ions, a means of irradiating the vessel 1 with ultraviolet light and a deposition unit for depositing selenium or tellurium on a substrate 2 by irradiating the acidic aqueous solution with the ultraviolet light.</p>
申请公布号 JP2002020108(A) 申请公布日期 2002.01.23
申请号 JP20000201848 申请日期 2000.07.04
申请人 JAPAN SCIENCE & TECHNOLOGY CORP 发明人 ICHIMURA MASAYA;TAKEUCHI KAZUYOSHI
分类号 C01B19/02;C01B19/04;H01L31/04;(IPC1-7):C01B19/02 主分类号 C01B19/02
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