PHOTOELECTRIC ENCODER AND ITS SENSOR HEAD MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a compact and high-performance optoelectric encoder and method for manufacturing the sensor head of such a photoelectric encoder. SOLUTION: The photoelectric encoder is constituted of a reflection-type scale 1 and the sensor head 4. The sensor head 4 is constituted of an irradiation light source 2 and a sensor substrate 3. The sensor substrate 3 is constituted by alternately arranging groups of light receiving elements 5 for outputting displacement signals of each phase and index lattices 6 for modulating irradiation light to the scale 1 on a transparent substrate 30. The index lattice 6 is made of a film of the same material as that of the metal electrode or metal wire of the groups of light receiving elements 5.