ZINC OXIDE LAMINATED THIN FILM BODY AND ITS PRODUCTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a zinc oxide laminated thin film body capable of affording a zinc oxide thin film layer having sufficiently low resistance in the film thickness direction in a zinc oxide laminated thin film body in which a zinc oxide thin film is laminated on a substrate by a sputtering method, and a thicker zinc oxide thin film is laminated thereon by an electrodeposition method and to provide a production method therefor. SOLUTION: In this zinc oxide laminated thin film body 4001 obtaining by laminating a zinc oxide thin film 4004 on a substrate 4002 by a sputtering method and further laminating a zinc oxide thin film 4005 thereon by an electrodeposition method, a dopant reducing resistance value is contained in the zinc oxide thin film 4004 by a sputtering method.