摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electron beam irradiator which does not cause unnecessary discharge in an accelerating tube, has a long life and can more uniformly irradiate an object with an electron beam, whose power source is compact and which is fabricated easily. SOLUTION: The electron beam irradiator which includes a gun structure that has an electron source and a gun grid and a high-voltage terminal that contains the gun structure and passes electrons and emits the electrons that passes through the high-voltage terminal into an irradiation space by way of an electron beam irradiation window is characterized by the use of a field emission element for the electron source.</p> |