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发明名称
Method for electrochemical deposition of metal using modulated waveforms
摘要
申请公布号
EP1132500(A3)
申请公布日期
2002.01.23
申请号
EP20010105317
申请日期
2001.03.07
申请人
APPLIED MATERIALS, INC.
发明人
GANDIKOTA, SRINIVAS;DUBOUST, ALAIN;NEO, SIEW;CHEN, LIANG-YUH;CHEUNG, ROBERT;CARL, DANIEL A.;SHIH, HONG
分类号
C25D5/18;C25D7/12;C25D21/12;H01L21/288;H01L21/768;(IPC1-7):C25D5/18
主分类号
C25D5/18
代理机构
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