发明名称 STRUCTURE HAVING PORE, AND MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of a structure having pores capable of controlling the array, interval, position, direction, shape, etc., of the pores manufactured by anodization. SOLUTION: In this manufacturing method of the array of the pores having substantially parallel axes to a surface of a substrate by achieving the anodization of a laminated film with an insulating layer and an anodized layer laminated on the substrate from an end of the laminated film, the anodized layer is a film mainly consisting of aluminum, the anodized layer is held by the insulating layers, the uneven array pattern of the intervals of the pores to be manufactured is made at least on one layer of the insulating layers in the direction of the pores.
申请公布号 JP2002020892(A) 申请公布日期 2002.01.23
申请号 JP20000201366 申请日期 2000.07.03
申请人 CANON INC 发明人 DEN TORU;IWASAKI TATSUYA
分类号 B01D67/00;B01D71/02;B81B1/00;C04B38/00;C25D11/04;C25D11/20;H01L21/316;H01L29/06;H01L49/00;(IPC1-7):C25D11/04 主分类号 B01D67/00
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