| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning-type plotting device which can plot a pattern without increasing the cost of the device, without remarkably narrowing a scanning range and without making the connection of lanes to be conspicuous. SOLUTION: A laser beam emitted from an argon laser generator 20 is led to a fixed plate 30, modulated and deflected by two scanning optical systems arranged on the plate 30 and scans the object of plotting and forms a pattern. The scanning range of first and second scanning optical system 50 and 60 scanning a first lane L1 and a second lane L2 is decided to satisfy|AS(h1)|>;|AS(h2)|and|h1|>|h2|when the image height of an end part on a side which is not brought into contact with the other lane is set to be h1, an astigmatic difference in the image height h1 to be AS(h1), the image height of an end point on a side which is brought into contact with the other lane to be h2 and an astigmatic difference in the image height h2 to be AS(h2). |
