| 摘要 |
PROBLEM TO BE SOLVED: To surely remove a foreign matter by using a tape by removing a tacky adhesive material left at the time of foreign matter removing process by using the tape. SOLUTION: An element substrate 10 subjected to the foreign matter removing process by the tape in a foreign matter removing process part 79 is conveyed to a lower part of a UV radiation device 80 through a conveying path 78. The surface of the element substrate 10 is irradiated with UV by the UV radiation device 80. The tacky adhesive material peeled off from the adhesive tape 76 is left on the surface of the element substrate 10 as a residual tacky adhesive material 12'. When the residual tacky adhesive material 12' is irradiated with UV, the residual tacky adhesive material 12' is cured and its tacky adhesive force is remarkably reduced. Then, the element substrate 10 is conveyed to the side of an air blowing device 81 and the residual tacky adhesive agent 12' whose tacky adhesive force is reduced is removed from the element substrate 10 by air blowing. Thus, the foreign matter is surely removed by the tape.
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