6-DEGREE OF FREEDOM MOTION MEASURING APPARATUS USING MULTI-DIRECTIONAL REFLECTOR AND SWING ARM OPTICAL SYSTEM FOR MEASURING 6-DEGREE OF FREEDOM MOTION OF HARD DISC DRIVE SLIDER

摘要

PROBLEM TO BE SOLVED: To provide a 6-degree of freedom motion measuring apparatus using a multi-directional reflector which is superior in measuring accuracy, easy to measure the displacement of a small object and capable of measuring a high-speed motion. SOLUTION: The 6-degree of freedom motion measuring apparatus is attached to an object under test. It comprises a multi-directional reflector having three reflective surfaces for reflecting an incident laser beam in three directions, three position detectors which receive laser beams reflected on the multi- directional reflector, and a controller for analyzing a 6-degree of freedom motion of the reflector, using the center of gravity of the intensity distribution of the laser beams detected by the three position detectors. Thus the apparatus can easily and accurately measure a six-degree of freedom displacement of the object, using the reflector having three reflective surfaces and easily measure the displacement of a high-speed moving small object under test.