MOTION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a motion sensor in which a plurality of motion elements can be detected with a simple structure through application of an oscillator. SOLUTION: The motion sensor comprises an oscillatory angular speed sensor section having a planar main body made of a piezoelectric material and a base part provided in the plate surface and detecting Coriolis force by a cantilever parallel leg of two legs or three legs, or an oscillatory acceleration sensor section having one or a plurality of rod-like oscillator or tuning fork oscillator where the oscillation frequency is varied according to an inertial force being applied from an additional mass provided at one end. Among angular speeds or accelerations of three axes, flexure or oscillation frequency is varied for a plurality of motion elements. An oscillatory angular speed sensor employing a torsion element or a secondary bending oscillation mode is also included.