| 摘要 |
PROBLEM TO BE SOLVED: To improve a method for correcting a measurement error caused by dynamic deformation of a scanning pin at the time of scanning a work piece. SOLUTION: A coordinate measuring equipment comprises a mechanism (3) fixed with a scanning head (9) and displacing in three coordinate directions to scan the surface of an object to be measure, i.e., a work piece (5), continuously thus providing corresponding measurements, and a unit for evaluating the measurements. The evaluating unit performs following operations. An operation for determining the dynamic bending characteristics of a scanning body as a one-dimensional or multi-dimensional parameter field, especially as a dynamic tensor (D), an operation for calculating a correction value from the parameter field (D) while taking account of the acceleration (→b) of the scanning body, and an operation for correcting the measurements.
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