| 摘要 |
PROBLEM TO BE SOLVED: To prevent a workpiece from lowering the quality by measuring the thickness of the piece without damage to the piece in various kinds of working devices. SOLUTION: A thickness measuring device 20 is constituted of a laser beam means 21, which irradiates a surface 40a of a workpiece 40 with a laser beam at a prescribed incident angleθ1, an image-pick up means 22, which picks up images of a first reflected beam 30a, which is reflected on the surface 40a of the piece 40, and a second reflected beam 30b, which enters into the piece 40 to reflect on a back surface 40b and then comes from the surface 40a, and a calculating means 23, which calculates a thickness t of the piece 40 from a distance a between the first reflected beam 30a and the second reflected beam 30b, which are picked up by the means 22.
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