X-Y STAGE

摘要

PROBLEM TO BE SOLVED: To guide a movable table in the X axis-Y axis direction with high accuracy only through a resilient hinge and to prevent rotational move of a movable table about X axis and Y axis without enhancing rigidity of the resilient hinge. SOLUTION: An intermediate frame 2 is coupled displaceably in the direction of X axis through a first resilient hinge 5 having a bendable direction set in the direction of X axis for a base (fixed base) 1, and an outer frame (movable table) 3 is coupled displaceably in the direction of Y axis through a second resilient hinge 6 having a bendable direction set in the direction of Y axis for the intermediate frame 2. At at least, three separated points in X axis-Y axis plane of the outer frame 3, rod members 20 having characteristics flexible in the bending direction and rigid in the axial direction are disposed while directing its axial direction in the direction of Z axis. One end of the rod member 20 is secured to the base 1 and the other end thereof is secured to the outer frame 3.