HYPERFINE-GRAINED MATERIAL BLOWING FILM DEPOSITION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a hyperfine-grained material blowing film deposition system by which a film sufficient in the joining of the hyperfine-grained material in the film, dense in the structure, smooth in the surface and uniform in density can be produced. SOLUTION: In this hyperfine-grained material blowing film deposition method in which, by a deposited film obtained by feeding arid depositing a hyperfine- grained material on the surface of a substrate by blowing, the film of the hyperfine-grained material is deposited, at least a part of the flow of the blowing of the hyperfine-grained material is obliquely made incident on the surface of the substrate.