| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method of laser beam machining and a device for laser beam machining, by which the adhesion and deposition of debris and dross on the inside of the machined part and its vicinity are prevented by a simple method and an excellent machined surface is available. SOLUTION: The surface of a liquid 6 in a processing tank 2 for machining is raised by a precision air pressure regulator 31 and the liquid surface comes in contact with the back side face of a work W. In this state, the front side surface of the work W is intermittently irradiated with a laser beam L in a pulse form. At the moment when the laser beam penetrates to the back side surface of the work W, the liquid 6 which is in contact with the back side surface of the work is vaporized by the heat of the laser beam machining and the liquid volume rapidly expands. The debris and dross produced in the machining of the work W are blown off and scattered in the air or floated in the liquid 6 by the rapid expansion of the volume due to the vaporization of the liquid 6, the adhesion to the inside of the machined part or its vicinity of the work 6 is prevented. Further, a crack and a break of the machined part are also prevented by the cooling effect of the liquid.</p> |
