| 摘要 |
PROBLEM TO BE SOLVED: To provide a, cleaning disc capable of easily and satisfactorily eliminating foreign matter stuck to the tip of a probe terminal. SOLUTION: This cleaning disc is provided for cleaning a tip part 8a of a contact pin 8 of a probe for inspecting a wafer formed with an IC chip and placed on a stage 7 of an inspection device, by bringing the contact pin 8 into contact with an electrode of the IC chip. The cleaning disc is formed in almost the same outline as the wafer, using a soft polymeric material mixed with abrasive 11 and pierceable with the tip part 8a of the contact pin 8.
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