发明名称 MICROSCOPIC STRUCTURE AND METHOD OF MANUFACTURING IT
摘要 PROBLEM TO BE SOLVED: To provide a microscopic structure and a manufacturing method therefor for manufacturing even the microscopic structure having the height not less than several hundred microns in a short time. SOLUTION: A plate-like member 3 is stuck on a support base board 1 via an adhesive layer 2, and plural cross-sectional pattern members 31, 32 and 33 are collectively formed by performing patterning up to penetrating through the plate-like member 3 by using a photolithography method. When successively joining and transferring these cross-sectional pattern members 31, 32 and 33 on an opposed base board 4, the microscopic structure 5 is completed on the opposed base board 4.
申请公布号 JP2002018798(A) 申请公布日期 2002.01.22
申请号 JP20000209365 申请日期 2000.07.11
申请人 FUJI XEROX CO LTD 发明人 YAMADA TAKAYUKI;TAKAHASHI MUTSUYA
分类号 B81B1/00;B81C1/00;C23C28/00;F16H55/06;F16H55/17;(IPC1-7):B81B1/00 主分类号 B81B1/00
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