CLEANING METHOD AND METHOD FOR MANUFACTURING LIQUID CRYSTAL DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a cleaning method by which both of the organic and inorganic contaminants can completely be removed from a work even when the work is cleaned with a hydrocarbone cleaning solution and a surfactant is never left, and to provide a method for manufacturing a liquid crystal device using the cleaning method. SOLUTION: The work is cleaned in first and second precleaning tanks 602 and 603 with a hydrocarbonic cleaning solution containing a surfactant such as fatty acid alkanolamide and the fatty acid salt of N- alkylalkylenediamine in addition to the normal paraffin such as normal nonane and normal decane as the main components in a cleaning machine 500 as a precleaning stage and then dip-cleaned, shower-cleaned or vapor-cleaned in a cleaning tank 601 with the hydrocarbonic cleaning solution free of the surfactant as a post-cleaning stage.