发明名称 Contactor and semiconductor device inspecting method
摘要 Semiconductor chips 15 are separated from one another by cutting a semiconductor wafer along scribing lines, and are fitted in recesses 11 formed in a contactor 10. Bump electrodes 13 are brought into contact with the pad electrodes of the semiconductor chips, so that the former electrodes are electrically connected to the latter electrodes. Each of the recesses of the contactors are surround by side walls which are trapezoid in section. Hence, the side walls can be readily fitted in the grooves formed along the scribing lines; that is, the semiconductors 15 can be fitted in the recesses 11 with ease. The contactor 10 and the dicing sheet having the semiconductor chips 15 are pressed against each other, so that the electrode connection is positively achieved.
申请公布号 US6340604(B1) 申请公布日期 2002.01.22
申请号 US19990455151 申请日期 1999.12.06
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 TSUURA KATSUHIKO
分类号 G01R31/28;(IPC1-7):H01L21/66 主分类号 G01R31/28
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