| 摘要 |
<p>PROBLEM TO BE SOLVED: To easily and accurately make image positioning in the first inspection coincident with image positioning in the next inspection. SOLUTION: The first Scout data set of an inspection object is generated in the first inspection of the inspection object, and at least one first image- pickup layer of the inspection object is determined on the basis of the first Scout data set. The next Scout data set of the inspection object is generated in at least one inspection following the first inspection. A position change between the first Scout data set and the next Scout data set is obtained, and corresponding to the obtained position change, a layer with equal positioning to the first layer in the inspection object is determined as at least one next image-pickup layer of the inspection object.</p> |
