ELECTROSTATIC ATTRACTION MECHANISM, SURFACE FINISHING METHOD, AND SURFACE FINISHING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a practical structure capable of suppressing inclusion of charged particles into a plate-like object. SOLUTION: An attraction power supply 3 applies voltages to a pair of attraction electrodes 23 and 24 provided in a dielectric block 22 having an attracting surface to induce static electricity on the attracting surface, thereby electrostatically attracting the plate-like object 9. The attraction power supply 3 adjusts a surface voltage of the plate-like object 9 by independently controlling the applied voltages to respective attraction electrodes 23 and 24. The surface of the plate-like object 9 is treated by this adjustment while suppressing injection of the charged particles into the plate-like object 9. Data obtained by previously measuring surface voltage of the plate-like object 9 while varying voltage applied to each of attraction electrodes 23 and 24 are stored in a storage 62, and a control part 6 for controlling the attraction power supply 3 controls the attraction power supply 3 selected according to this data.