发明名称 |
DISPLACEMENT CONTROL METHOD OF MOVING TABLE, MEMBER MACHINING METHOD, X-Y STAGE DEVICE, AND MANUFACTURING METHOD OF X-Y STAGE DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To move a moving table on a circuit locus at high speed and high accuracy. SOLUTION: In a displacement control method of the moving table 2 in the X-Y stage device 15 that has the moving table 2 guided on the X-Y plane and can shift a member loaded on the moving table 2 on the X-Y plane, the moving table 2 is guided on the X-Y plane by an X-Y guide mechanism 50 accompanied by an elastic deformation act, an X-directional natural frequency is made to coincide with a Y-directional natural frequency when the moving table 2 moves in the X-direction and the Y-direction, and the moving table 2 is moved on the circuit locus so that motion frequency f satisfies 0.66 T<f<2.0 T for the natural frequency value T.
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申请公布号 |
JP2002018665(A) |
申请公布日期 |
2002.01.22 |
申请号 |
JP20000207048 |
申请日期 |
2000.07.07 |
申请人 |
SUMITOMO HEAVY IND LTD |
发明人 |
MORITA HIROSHI;KANEKO MAKOTO;NAKAMORI YASUHITO;SUGIMINE MASANOBU |
分类号 |
G12B5/00;B23H1/00;B23Q1/00;B23Q1/25;B23Q1/34;B23Q1/36;B23Q5/28;(IPC1-7):B23Q5/28 |
主分类号 |
G12B5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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