TREATMENT OF PROCESS GAS EFFLUENT

摘要

PROBLEM TO BE SOLVED: To minimize introduction of harmful gases included in process gas effluent into the environment. SOLUTION: Hazardous gases such as perfluorocompounds in the process gas effluent are lowered by reacting the process gas effluent with a hydroxy radical generating additive and/or oxygen radical generating additive. In another version, energy to drive the reaction may be provided by a heater, a catalyst and/or a photoactivator.